Liquid droplet ejection apparatus, method for manufacturing electro-optical apparatus, electro-optical apparatus, and electronic apparatus

ABSTRACT

A liquid droplet ejection apparatus includes a writing device, a weight measuring device disposed adjacent to the writing device, and a controlling device. The writing device performs writing on a workpiece by ejecting functional liquid from at least one ink jet functional liquid droplet ejection head while moving the functional liquid droplet ejection head relative to the workpiece. The weight measuring device measures an amount of ejected droplets from a weight of the functional liquid ejected from the functional liquid droplet ejection head. The controlling device controls a driving power for the functional liquid droplet ejection head on the basis of a measurement result input from the weight measuring device.

The entire disclosure of Japanese Application No. 2006-281684, filedOct. 16, 2006, is expressly incorporated by reference herein.

BACKGROUND

1. Technical Field

The present invention relates to a liquid droplet ejection apparatusthat performs writing on a workpiece by ejecting functional liquid froman ink jet functional liquid droplet ejection head, an electro-opticalapparatus, an electronic apparatus, and a method for manufacturing anelectro-optical apparatus.

2. Related Art

A liquid droplet ejection apparatus including a writing unit (ejectingunit) that performs writing on a workpiece (substrate) by ejectingfunctional liquid from a functional liquid droplet ejection head whilemoving the functional liquid droplet ejection head relative to theworkpiece and a weight measuring device that is disposed adjacent to thewriting unit and that measures the amount of ejected droplets from theweight of the functional liquid ejected from the functional liquiddroplet ejection head is known (see, for example, JP-A-2004-177262).This liquid droplet ejection apparatus adjusts a driving power for thefunctional liquid droplet ejection head on the basis of a result ofmeasurement performed by the weight measuring device.

However, for such a known liquid droplet ejection apparatus, the drivingpower is adjusted by the user on the basis of the measurement result, soit takes time for the measurement result to be reflected in the drivingpower. This makes it difficult to quickly respond to the measurementresult. In addition, adjusting is a laborious task for the user.

SUMMARY

An advantage of some aspects of the invention is that it provides aliquid droplet ejection apparatus that can quickly reflect a measurementresult in a driving power for a functional liquid droplet ejection head,an electro-optical apparatus, an electronic apparatus, and a method formanufacturing an electro-optical apparatus.

According to a first aspect of the invention, a liquid droplet ejectionapparatus includes a writing device, a weight measuring device disposedadjacent to the writing device, and a controlling device. The writingdevice performs writing on a workpiece by ejecting functional liquidfrom at least one ink jet functional liquid droplet ejection head whilemoving the functional liquid droplet ejection head relative to theworkpiece. The weight measuring device measures an amount of ejecteddroplets on the basis of a weight of the functional liquid ejected fromthe functional liquid droplet ejection head. The controlling devicecontrols a driving power for the functional liquid droplet ejection headon the basis of a measurement result input from the weight measuringdevice.

In accordance with the above structure, the driving power for thefunctional liquid droplet ejection head is controlled based on themeasurement result input from the weight measuring device by thecontrolling device, not by a user. Therefore, compared with a structurein which the user adjusts the driving power on the basis of themeasurement result, the result of measurement of the amount of ejectedliquid droplets can be quickly reflected in the driving power for thefunctional liquid droplet ejection head.

In this case, preferably, the liquid droplet ejection apparatusaccording to claim 1 may further include a cleaning device that sucksthe functional liquid in the functional liquid droplet ejection head andwipes the functional liquid droplet ejection head. The writing devicemay include an x-axis table that mounts the workpiece thereon and thatmoves the workpiece in the x-axis direction and a y-axis table thatmounts the functional liquid droplet ejection head thereon and thatmoves the functional liquid droplet ejection head in the y-axisdirection. The cleaning device may be disposed in a path of movement ofthe functional liquid droplet ejection head in the y-axis direction. Theweight measuring device may be disposed between the x-axis table and thecleaning device in a path of movement of the functional liquid dropletejection head.

In accordance with the structure described above, (the nozzles of) thefunctional liquid droplet ejection head can face the weight measuringdevice after having been cleaned by the cleaning device. Therefore,inability to measure weight and defects of weight measurement caused byejection defects of the functional liquid droplet ejection head can beefficiently reduced. In addition, tact time required for a series ofsteps of suction, wiping, weight measurement, and writing can beshortened.

In this case, preferably, the at least one functional liquid dropletejection head may include a plurality of functional liquid dropletejection heads. The weight measuring device may include a container thatreceives functional liquid ejected from any one of the functional liquiddroplet ejection heads, an electronic balance that measures a weight ofthe functional liquid in the container, and a flushing box disposedaround the container. While the functional liquid droplet ejection headperforms measurement ejection on the container, the flushing boxreceives waste ejection from the other functional liquid dropletejection heads.

In accordance with the structure described above, while any one of thefunctional liquid droplet ejection heads ejects functional liquid to bemeasured, the other functional liquid droplet ejection heads being in astate waiting for completion of the measurement ejection can performwaste ejection. This can prevent the nozzles from being dried in thewaiting state, result in good measurement ejection after the waitingstate ends, and lead to obtainment of appropriate measurement results.

In this case, preferably, the liquid droplet ejection apparatus mayfurther include a sub-table that moves the weight measuring device inthe x-axis direction. The plurality of functional liquid dropletejection heads may be arranged in the x-axis direction and divided intohead groups.

In accordance with the structure described above, for the apparatushaving the plurality of functional liquid droplet ejection heads, theplurality of functional liquid droplet ejection heads can sequentiallyface the weight measuring device with ease.

In this case, preferably, the liquid droplet ejection apparatus mayfurther include a windshield cover that covers a space above thecontainer when the weight of the functional liquid is measured by theelectronic balance, the windshield cover being disposed in a path ofmovement of the sub-table.

In accordance with the structure described above, during weightmeasurement, because the sub-table has moved the weight measuring deviceunder the windshield cover, the electronic balance can accuratelymeasure the weight without being affected by an air current.

According to a second aspect of the invention, a method formanufacturing an electro-optical apparatus forms a film on the substrateusing the liquid droplet ejection apparatus.

According to a third aspect of the invention, an electro-opticalapparatus includes the workpiece on which a film is formed using theliquid droplet ejection apparatus.

In accordance with these structures, the use of the liquid dropletejection apparatus capable of quickly reflecting the measurement resultof the amount of ejected droplets in the driving power for thefunctional liquid droplet ejection head enables efficient manufacture ofa high-quality electro-optical apparatus. Examples of theelectro-optical apparatus (flat panel display (FPD)) include a colorfilter, a liquid crystal display apparatus, an organic EL apparatus, aplasma display panel (PDP) apparatus, and an electron emissionapparatus. Examples of the electron emission apparatus include a fieldemission display (FED) and a surface-conduction electron-emitter display(SED). Other examples of the electro-optical apparatus includeapparatuses for forming metallic wiring, a lens, a resist, and a lightdiffuser.

According to a fourth aspect of the invention, an electronic apparatusincludes the electro-optical apparatus manufactured by the method orincluding the electro-optical apparatus.

In this case, examples of the electronic apparatus include variouselectrical products, in addition to a cellular phone and a personalcomputer that incorporate a flat panel display.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described with reference to the accompanyingdrawings, wherein like numbers reference like elements.

FIG. 1 is a plan view of a liquid droplet ejection apparatus accordingto an embodiment of the invention.

FIG. 2 is a side view of the liquid droplet ejection apparatus.

FIG. 3 illustrates functional liquid droplet ejection heads divided intohead groups.

FIG. 4 is a plan view of a weight measuring unit.

FIG. 5 is a front view of the weight measuring unit.

FIG. 6 is a schematic front view of the liquid droplet ejectionapparatus.

FIGS. 7A to 7C are illustrations for describing a series of operationsfor weight measurement performed by the liquid droplet ejectionapparatus.

FIG. 8 is a control block diagram for describing how a driving power forthe functional liquid droplet ejection head is controlled based on aresult of measurement performed by a weight measuring device.

FIG. 9 is a flowchart of a process for manufacturing a color filter.

FIGS. 10A to 10E are schematic cross-sectional views of a color filterfor each step in sequence.

FIG. 11 is a cross-sectional view illustrating main portions of ageneral structure of a first example of a liquid crystal apparatus thatincludes a color filter to which an aspect of the invention is applied.

FIG. 12 is a cross-sectional view illustrating main portions of ageneral structure of a second example of a liquid crystal apparatus thatincludes a color filter to which an aspect of the invention is applied.

FIG. 13 is an exploded perspective view of main portions of a generalstructure of a third example of a liquid crystal apparatus that includesa color filter to which an aspect of the invention is applied.

FIG. 14 is a cross-sectional view of main portions of an organicelectroluminescent (EL) display apparatus.

FIG. 15 is a flowchart of a process of manufacturing an organic ELdisplay apparatus.

FIG. 16 is an illustration for describing a step of forming an inorganicbank layer.

FIG. 17 is an illustration for describing a step of forming an organicbank layer.

FIG. 18 is an illustration for describing a state of a step of forming ahole injection/transport layer.

FIG. 19 is an illustration for describing a state in which the holeinjection/transport layer is formed.

FIG. 20 is an illustration for describing a stage of a step for forminga blue light-emitting layer.

FIG. 21 is an illustration for describing a state in which the bluelight-emitting layer is formed.

FIG. 22 is an illustration for describing a state in which colorlight-emitting layers are formed.

FIG. 23 is an illustration for describing formation of a cathode.

FIG. 24 is an exploded perspective view of main portions of a plasmadisplay panel (PDP) apparatus.

FIG. 25 is a cross-sectional view of main portions of an electronemission display apparatus (a field emission display (FED) apparatus).

FIG. 26A is a plan view of an electron emitting portion and itssurroundings, and FIG. 26B is a plan view for describing a method forforming the electron emitting portion.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Embodiments of the invention are described below with reference to theaccompanying drawings. A liquid droplet ejection apparatus according toa present embodiment is incorporated in a manufacturing line for a flatpanel display. The liquid droplet ejection apparatus forms (by ink jetprinting) a light-emitting element included in a pixel of a color filterin a liquid crystal display apparatus or an organic EL apparatus using afunctional liquid droplet ejection head in which functional liquid, suchas a special ink or luminous resin liquid, is introduced.

As illustrated in FIGS. 1 and 2, a liquid droplet ejection apparatus 1includes a writing device 2 on which a plurality of functional liquiddroplet ejection heads 17 (see FIG. 3) are mounted, a cleaning device 3extending in the y-axis direction, a weight measuring unit 4 disposedbetween the writing device 2 and the cleaning device 3, and acontrolling device 5 (see FIG. 5). The controlling device 5 includes aprogrammable logic controller (PLC) having a central processing unit(CPU) and a memory. The liquid droplet ejection apparatus 1 isaccommodated in a chamber (not shown) capable of forming, for example, adry air atmosphere.

The writing device 2 includes an x-axis table 11 on an x-axis supportbase 10 (e.g., granite surface plate), a y-axis table 12 orthogonal tothe x-axis direction, and a plurality of (e.g., ten) movable carriages13 suspended from the y-axis table 12.

The x-axis table 11 includes a set table 21 on which a substrate W ismountable, an x-axis slider 22 slidably supporting the set table 21, andan x-axis moving mechanism (linear motor) 23 for moving the x-axisslider 22 in the x direction. The use of the x-axis moving mechanism 23enables the set table 21 (substrate W) to be reciprocated in the x-axisdirection via the x-axis slider 22 relative to the functional liquiddroplet ejection heads 17.

The x-axis table 11 further includes an inspection table 43, which willbe described below, and a maintenance slider 24 slidably supporting aperiodic flushing unit 45. The x-axis slider 22 and the maintenanceslider 24 are individually movable.

The y-axis table 12 is supported by a strut 31 and extends over thex-axis table 11 and the cleaning device 3. The y-axis table 12 includesa plurality of (e.g., ten) bridge plates 32 suspending the respectivecarriages 13, a plurality of (e.g., ten) pairs of y-axis sliders 33slidably supporting the both ends of the respective bridge plates 32 anda pair of y-axis moving mechanisms (linear motors) 34 capable of movingthe y-axis sliders 33 in the y-axis direction. The use of the pair ofy-axis moving mechanisms 34 enables the carriages 13 to be individuallymoved in the y-axis direction via the respective pairs of y-axis sliders33. That is, the y-axis table 12 can move the carriages 13 across thex-axis table 11, the weight measuring unit 4, and units of the cleaningdevice 3, which will be described below.

As illustrated in FIG. 3, the plurality of (e.g., 12) functional liquiddroplet ejection heads 17 are mounted on a carriage plate 36 in each ofthe carriages 13. The 12 functional liquid droplet ejection heads 17 aredivided into two groups in the y-axis direction and one head group 16includes six functional liquid droplet ejection heads 17 arranged in thex-axis direction. All the functional liquid droplet ejection heads 17(12×10) mounted on the carriages 13 form a continuous writing line inthe y-axis direction. The length of the writing line corresponds to themaximum width of the substrate W mountable on the set table 21.

Each of the functional liquid droplet ejection heads 17 receivesfunctional liquid supplied from a functional liquid pack (not shown) andejects the functional liquid by an ink jet method (e.g., driving of apiezoelectric element). Application of a driving power from a headdriver 38 (see FIG. 8) causes the functional liquid to be ejected from aplurality of nozzles (e.g., 180×2 rows). The driving power is controlledby the controlling device 5 on the basis of a measurement result inputfrom a plurality of weight measurement devices 51, which will bedescribed below. The details of the control will be described below.

The writing device 2 having the structure described above ejectsfunctional liquid to the substrate W and performs writing thereon undercontrol of the controlling device 5. That is, the writing device 2reciprocates the substrate W relative to the functional liquid dropletejection heads 17 using the x-axis table 11 and, in synchronizationtherewith, drives the functional liquid droplet ejection heads 17 andperforms writing on the substrate W.

As illustrated in FIGS. 1 and 2, the cleaning device 3 includes aplurality of (e.g., ten) suction units 41 and a single wiping unit 42,which is more adjacent to the x-axis table 11 than are the suction units41. The suction units 41 and the wiping unit 42 are disposed along thepath of movement of the functional liquid droplet ejection heads 17caused by the y-axis table 12 such that the carriages 13 can face eachof these units.

The plurality of suction units 41 correspond to the plurality ofcarriages 13. Each of the suction units 41 sucks functional liquid fromthe nozzles of each of the functional liquid droplet ejection heads 17through a head cap (not shown) sealing the surfaces of the nozzles ofthe functional liquid droplet ejection head 17, performs cleaning, andinitially charges functional liquid. The wiping unit 42 wipes the nozzlesurfaces of the functional liquid droplet ejection head 17 soiled withattached functional liquid for each of the carriages 13 by a cleaningoperation using a wiping sheet 42 a (see FIG. 6).

As described above, the maintenance slider 24 supports the inspectiontable 43 and the periodic flushing unit 45. The inspection table 43receives inspection ejection for inspecting the functional liquiddroplet ejection head 17 for ejection defects. The image of aninspection pattern for ejection is captured by an inspection camera 44.The controlling device 5 recognizes the image and determines whetherejection defects occur. The periodic flushing unit 45 receives wasteejection performed to prevent the nozzles of the functional liquiddroplet ejection head 17 from being dried during replacement of thesubstrate W with a next one.

As illustrated in FIGS. 4 and 5, the weight measuring unit 4 includesthe plurality of (e.g., four) weight measurement devices 51 and asub-table 52 for moving the weight measurement devices 51 in the x-axisdirection and, a windshield cover 53 (shown in FIG. 5) disposed in thepath of movement of the sub-table 52.

The sub-table 52 includes a support frame 56 collectively supporting theplurality of weight measurement devices 51, a weight measurement slider57 supporting the weight measurement devices 51 so as to allow them toslide in the x-axis direction, and a motor-driven weight measurementmoving mechanism 58 for sliding the weight measurement slider 57 in thex-axis direction.

The weight measurement devices 51 are aligned in the y-axis direction.One of the weight measurement devices 51 corresponds to one of the headgroups 16. Therefore, weight is measured by the four weight measurementdevices 51 for every two of the carriages 13.

Each of the weight measurement devices 51 includes a container 61 forreceiving functional liquid ejected from any one of the six functionalliquid droplet ejection heads 17 of the head group 16, an electronicbalance 62 (see FIG. 6) for measuring the weight of functional liquidvia the container 61, a flushing box 63 surrounding the container 61,and a casing 64 accommodating and supporting these elements. Afunctional-liquid absorber 65 is laid in the flushing box 63 such thatboth longer sides of the functional-liquid absorber 65 are pressed by apair of pressing plates 66. The flushing box 63 receives waste ejectionfrom the other five functional liquid droplet ejection heads 17 when onefunctional liquid droplet ejection head 17 ejects functional liquid tobe measured to the container 61.

According to the present embodiment, a single weight measurement device51 performs measurement on six functional liquid droplet ejection heads17. Therefore, while any one of the first functional liquid dropletejection heads 17 ejects functional liquid to be measured, the otherfive functional liquid droplet ejection heads 17 need to wait forcompletion of the measurement ejection. These five functional liquiddroplet ejection heads 17 being in the waiting state can perform wasteejection. This can prevent the nozzles from being dried in a waitingstate, result in good ejection for measurement after the waiting stateends, and lead to obtainment of appropriate measurement results.

A series of operations for weight measurement is now be described belowwith reference to FIGS. 6 and 7. First, two carriages 13 adjacent to theweight measuring unit 4 among all the carriages 13 facing the suctionunits 41 are moved in the y-axis direction, wiped by the wiping unit 42,and then set so as to face the weight measuring unit 4. Alternatively,all the carriages 13 may be moved from the suction units 41 to theinspection table 43 and eject functional liquid to be measured, and theinspection camera 44 may determine normal ejection for all the nozzlesbefore the carriages 13 are moved so as to face the weight measuringunit 4 for every two of the carriages 13.

Subsequently, the sub-table 52 sets the container 61 of each of theweight measurement devices 51 to face a first functional liquid dropletejection head 17 a in the each of the head groups 16. Functional liquidto be measured is ejected from all the nozzles of the first functionalliquid droplet ejection head 17 a to the container 61. At this time,second to sixth functional liquid droplet ejection heads 17 b to 17 f inthe head group 16 perform waste ejection to the flushing box 63 (seeFIG. 7A).

Then, the container 61 is moved under the windshield cover 53 by thesub-table 52. In this state, the amount of ejected droplets is measuredby the electronic balance 62 (see FIG. 7B). Because the electronicbalance 62 is shielded from an air current (e.g., a downward air currentor a turbulent flow caused by a chamber) by the windshield cover 53, theweight can be accurately measured without being affected by the aircurrent.

After the amount of liquid droplets ejected from the first functionalliquid droplet ejection head 17 a is measured, the second functionalliquid droplet ejection head 17 b is set so as to face the container 61and ejects functional liquid to be measured in a similar way (see FIG.7C). Similarly, the amounts of droplets ejected from the six functionalliquid droplet ejection heads 17 in the head group 16 are sequentiallymeasured. Here, the amount of droplets ejected from all the nozzles ofeach of the functional liquid droplet ejection heads 17 is measured.However, the invention is not limited to this structure. For example,the amount of ejected droplets may be measured for each nozzle row, ormay further be measured for each nozzle.

FIG. 8 is a control block diagram for describing how a driving power forthe functional liquid droplet ejection head 17 is controlled based on aresult of measurement performed by the weight measurement device 51. Theelectronic balance 62 outputs a measurement result determined in theabove-described way to the controlling device 5. The controlling device5 controls a driving power (voltage value) to be applied from the headdriver 38 to the functional liquid droplet ejection head 17 on the basisof the result of measurement performed by the electronic balance 62.More specifically, when the result of weight measurement falls within atarget range, the next substrate W is written without a change of thevoltage value. When the result of weight measurement falls outside thetarget range, the voltage value is changed based on data on resolvingpower for a previously determined applied voltage value and the measuredweight value. The weight is measured again using the changed voltagevalue. Measuring the weight and changing the voltage value are repeateduntil the result of weight measurement falls in the target range.

As described above, in accordance with the liquid droplet ejectionapparatus 1 according to the present embodiment, a driving power for thefunctional liquid droplet ejection head 17 is controlled based on ameasurement result input from the weight measurement device 51, not by auser. Therefore, compared with a structure in which the user adjusts adriving power on the basis of a measurement result, the result ofmeasurement of the amount of ejected droplets can be quickly reflectedin the driving power for the functional liquid droplet ejection head 17.

Examples of an electro-optical apparatus (flat panel display)manufactured using the liquid droplet ejection apparatus 1 according tothe embodiment described above include a color filter, a liquid crystaldisplay, an organic EL display, a plasma display panel (PDP) apparatus,and an electron emission display (field emission display (FED) and asurface-conduction electron-emitter display (SED)). Exemplary structuresof these examples and an active matrix substrate formed therein andmethods for manufacturing the same will now be described below. Theactive matrix substrate is a substrate in which a thin film transistorand source and data lines electrically connected thereto are formed.

First, a method for manufacturing a color filter incorporated in aliquid crystal display, an organic EL display, or other displays isdescribed. FIG. 9 is a flowchart of a process for manufacturing a colorfilter. FIGS. 10A to 10E are schematic cross-sectional views of a colorfilter 500 (filter base 500A) according to an embodiment for each stepin sequence.

In a black matrix formation step (S101), as illustrated in FIG. 10A, ablack matrix 502 is formed on a substrate (W) 501. The black matrix 502is made of metallic chromium, a layered structure of metallic chromiumand chromium oxide, or a resin black matrix. The black matrix 502 can bemade of a thin metal film by, for example, sputtering or vapordeposition. The black matrix 502 can be made of a thin resin film bygravure printing or using a photoresist process or a thermal transferprocess.

Subsequently, in a bank formation step (S102), a bank 503 is superposedon the black matrix 502. First, as illustrated in FIG. 10B, a resistlayer 504 made of a transparent negative photosensitive resin is formedso as to cover the substrate 501 and the black matrix 502. Then, anupper surface of the resist layer is coated with a mask film 505 havinga matrix pattern shape, and the structure is exposed.

Then, as illustrated in FIG. 10C, the resist layer 504 is patterned byetching of an unexposed portion of the resist layer 504, thus formingthe bank 503. When the black matrix 502 is made of a resin black matrix,the black matrix 502 can also serve as the bank 503.

The bank 503 and the black matrix 502 disposed thereunder constitute apartition 507 b dividing pixel regions 507 a. The partition 507 bdefines a target area for ejection of functional liquid droplets whencolored layers (film portions) 508R, 508G, and 508B are formed using thefunctional liquid droplet ejection heads 17 in a colored layer formationstep described below.

The filter base 500A is obtained through the black matrix formation stepand the bank formation step described above.

In the present embodiment, the bank 503 is made of a resin material thatallows the bank 503 to have a lyophobic (hydrophobic) coated filmsurface. Because the substrate (glass substrate) 501 has a lyophilic(hydrophilic), variations of points where droplets are ejected to reacheach of the pixel regions 507 a surrounded by the bank 503 can beautomatically reduced in the colored layer formation step describedbelow.

In the colored layer formation step (S103), as illustrated in FIG. 10D,functional liquid is ejected from the functional liquid droplet ejectionheads 17 into the respective pixel regions 507 a surrounded by the bank503. In this case, droplets of the functional liquid are ejected usingthe functional liquid droplet ejection heads 17 in which functionalliquids (filter materials) of three colors of red, green, and blue(RGB). Examples of a layout pattern of the three colors of RGB include astripe pattern, a mosaic pattern, and a delta pattern.

Thereafter, the functional liquids are fixed through drying treatment(e.g., heating), and then the colored layers 508R, 508G, and 508Bcorresponding to the respective three colors are formed. After theformation of these colored layers 508R, 508G, and 508B, flow proceeds toan overcoat layer formation step (S104), where an overcoat layer 509 isformed so as to cover the upper surfaces of the substrate 501, thepartition 507 b, and the colored layers 508R, 508G, and 508B, asillustrated in FIG. 10E.

More specifically, overcoat-layer coating liquid is ejected to theentire surface of the substrate 501 with the colored layers 508R, 508G,and 508B formed thereon, and then the overcoat layer 509 is formedthrough drying treatment.

After the formation of the overcoat layer 509, the color filter 500proceeds to the next film formation step of forming a transparentelectrode made of, for example, indium tin oxide (ITO).

FIG. 11 is a cross-sectional view illustrating main portions of ageneral structure of a passive matrix liquid crystal apparatus (liquidcrystal apparatus) 520 as a first example of a liquid crystal displaythat includes the color filter 500. A transmissive liquid crystaldisplay is obtained as a final product by mounting of ancillary parts,such as an IC for driving a liquid crystal layer, a backlight, and asupport, on the liquid crystal apparatus. The color filter 500 shown inFIG. 11 is the same as that in FIG. 10, so the same reference numeralsare used in the corresponding elements in FIG. 11. The detaileddescription thereof is not repeated here.

The liquid crystal apparatus 520 includes the color filter 500, acounter substrate 521 (e.g., a glass substrate), and a liquid crystallayer 522 being made of a super twisted nematic (STN) liquid crystalcomposite and being sandwiched between the color filter 500 and thecounter substrate 521. The color filter 500 is disposed at the upperside in the drawing (adjacent to an observer).

Although not illustrated, a polarizer is disposed adjacent to an outersurface (i.e., a surface remote from the liquid crystal layer 522) ofeach of the counter substrate 521 and the color filter 500, and abacklight is disposed outside the polarizer facing the counter substrate521.

A plurality of first electrodes 523 are spaced at predeterminedintervals on the overcoat layer 509 of the color filter 500 (adjacent tothe liquid crystal layer 522). Each of the first electrodes 523 has astrip shape whose longer side extends horizontally in the drawing. Afirst alignment layer 524 is formed so as to cover a surface of thefirst electrode 523 that is remote from the color filter 500.

A plurality of second electrodes 526 are spaced at predeterminedintervals on a surface of the counter substrate 521 that faces the colorfilter 500. Each of the second electrodes 526 has a strip-shape whoselonger side extends in a direction substantially orthogonal to thelonger side of the first electrode 523 disposed adjacent to the colorfilter 500. A second alignment layer 527 is formed so as to cover asurface of the second electrode 526 that is adjacent to the liquidcrystal layer 522. Each of the first electrode 523 and the secondelectrode 526 can be made of a transparent conductive material, such asITO.

One or more spacers 528 are disposed in the liquid crystal layer 522 tomaintain the thickness of the liquid crystal layer 522 (cell gap)constant. A sealant 529 functions to prevent the liquid crystalcomposite in the liquid crystal layer 522 from leaking out. A first endof the first electrode 523 extends as an interconnection line 523 aoutside the sealant 529.

The intersections of the first electrodes 523 and the second electrodes526 correspond to pixels, and the colored layers 508R, 508G, and 508B ofthe color filter 500 are positioned in the pixels.

In normal manufacturing processes, the color filter 500 is subjected topatterning for the first electrodes 523 and coating of the firstalignment layer 524 to prepare the surroundings of the color filter 500,and the counter substrate 521 is subjected to patterning for the secondelectrodes 526 and coating of the second alignment layer 527 to preparethe surroundings of the counter substrate 521. Then, the spacers 528 andthe sealant 529 are built on the counter substrate 521 with the secondelectrode 526 and the second alignment layer 527, and in this state, thecolor filter 500 with the first electrode 523 and the first alignmentlayer 524 is attached thereto. Thereafter, liquid crystal molecules toconstitute the liquid crystal layer 522 are injected into a port in thesealant 529, and the port is sealed. Then, both the polarizers and thebacklight are superposed.

The liquid droplet ejection apparatus 1 according to the embodiment canapply a spacer material (functional liquid) to define the cell gap andcan also uniformly apply liquid crystal molecules (functional liquid) toa region surrounded by the sealant 529 before the counter substrate 521and the liquid crystal apparatus 520 are attached together. Thefunctional liquid droplet ejection head 17 can perform printing on thesealant 529. The functional liquid droplet ejection head 17 can alsoperform coating of the first alignment layer 524 and the secondalignment layer 527.

FIG. 12 is a cross-sectional view illustrating main portions of ageneral structure of a second example of a liquid crystal apparatus thatincludes the color filter 500 manufactured according to the embodiment.

One major difference between a liquid crystal apparatus 530 and theliquid crystal apparatus 520 is that the color filter 500 in FIG. 12 isdisposed at the lower side in the drawing (remote from an observer).

The liquid crystal apparatus 530 includes the color filter 500, acounter substrate 531 (e.g., a glass substrate), and a liquid crystallayer 532 being made of a super twisted nematic (STN) liquid crystalcomposite and being sandwiched between the color filter 500 and thecounter substrate 531. Although not illustrated, a polarizer is disposedadjacent to an outer surface of each of the counter substrate 531 andthe color filter 500.

A plurality of first electrodes 533 are spaced at predeterminedintervals on the overcoat layer 509 of the color filter 500 (adjacent tothe liquid crystal layer 532). Each of the first electrodes 533 has astrip shape whose longer side extends in a direction of the back side ofthe drawing. A first alignment layer 534 is formed so as to cover asurface of the first electrode 533 that is remote from the color filter500.

A plurality of second electrodes 536 are spaced at predeterminedintervals on a surface of the counter substrate 531 that faces the colorfilter 500. Each of the second electrodes 536 has a strip shape whoselonger side extends in a direction substantially orthogonal to thelonger side of the first electrode 533 disposed adjacent to the colorfilter 500. A second alignment layer 537 is formed so as to cover asurface of the second electrode 536 that is adjacent to the liquidcrystal layer 532.

The liquid crystal layer 532 is provided with one or more spacers 538for maintaining the thickness of the liquid crystal layer 522 constantand a sealant 539 for preventing the liquid crystal composite in theliquid crystal layer 522 from leaking out.

As in the case of the liquid crystal apparatus 520, the intersections ofthe first electrodes 533 and the second electrodes 536 correspond topixels, and the colored layers 508R, 508G, and 508B of the color filter500 are positioned in the pixels.

FIG. 13 is an exploded perspective view of main portions of a generalstructure of a transmissive thin film transistor (TFT) liquid crystalapparatus 550 as a third example of a liquid crystal display thatincludes the color filter 500, to which an aspect of the invention isapplied.

The color filter 500 in the liquid crystal apparatus 550 is disposed atthe upper side in the drawing (adjacent to an observer).

The liquid crystal apparatus 550 includes the color filter 500, acounter substrate 551 opposed to the color filter 500, a liquid crystallayer (not shown) sandwiched therebetween, a polarizer 555 above thecolor filter 500 (adjacent to an observer), and a polarizer (not shown)below the counter substrate 551.

An electrode 556 for driving liquid crystal molecules is disposed on asurface of the overcoat layer 509 of the color filter 500 (a surfaceadjacent to the counter substrate 551). The electrode 556 is made of atransparent conductive material (e.g., ITO) and is formed so as to coverthe entire area on which pixel electrodes 560, which are describedbelow, are formed. An alignment layer 557 is disposed so as to cover asurface of the electrode 556 that is adjacent to the pixel electrodes560.

An insulating layer 558 is disposed on a surface of the countersubstrate 551 that faces the color filter 500. Scanning lines 561 andsignal lines 562 substantially orthogonal thereto are disposed on theinsulating layer 558. The pixel electrodes 560 are formed in areassurrounded by the scanning lines 561 and the signal lines 562. Althoughnot shown, another alignment layer is disposed on the pixel electrodes560.

A thin film transistor 563 including a source electrode, a drainelectrode, a semiconductor, and a gate electrode is incorporated in aregion surrounded by a notch of each of the pixel electrodes 560, thescanning lines 561, and the signal lines 562. Application of a signal tothe scanning line 561 and the signal line 562 switches the thin filmtransistor 563 on and off, thereby enabling control of energization tothe pixel electrode 560.

The liquid crystal apparatuses 520, 530, 550 described above are of thetransmissive type. However, they may be a reflective or transflectiveliquid crystal apparatus by having a reflective layer or transflectivelayer, respectively.

FIG. 14 is a cross-sectional view of main portions of a display regionof an organic electroluminescent (EL) apparatus (hereinafter referred tosimply as a display apparatus 600).

The display apparatus 600 includes a substrate (W) 601, a circuitelement portion 602, a light emitting portion 603, and a cathode 604 insequence.

In the display apparatus 600, light emitted from the light emittingportion 603 toward the substrate 601 passes through the circuit elementportion 602 and the substrate 601 and emerges therefrom toward anobserver.

An underlayer overcoat layer 606 made of a silicon oxide film isdisposed between the circuit element portion 602 and the substrate 601.An island-shaped semiconductor film 607 made of polycrystalline siliconis disposed on a surface of the underlayer overcoat layer 606 (a surfaceadjacent to the light emitting portion 603). A source region 607 a and adrain region 607 b are formed in the left and right areas in thesemiconductor film 607 by high-concentration ion implantation. A channelregion 607 c lies in a region in which positive ions are not implanted.

A transparent gate insulating layer 608 covering the underlayer overcoatlayer 606 and the semiconductor film 607 is disposed in the circuitelement portion 602. A gate electrode 609 is disposed on the gateinsulating layer 608 at a position that corresponds to the channelregion 607 c of the semiconductor film 607. The gate electrode 609 canbe made of aluminum, molybdenum, tantalum, titanium, and tungsten.Transparent first and second interlayer insulating films 611 a and 611 bare stacked on the gate electrode 609 and the gate insulating layer 608.A contact hole 612 a is formed so as to pass through the first andsecond interlayer insulating films 611 a and 611 b and communicate withthe source region 607 a. A contact hole 612 b is formed so as to passthrough the first interlayer insulating film 611 a and communicate withthe drain region 607 b.

A transparent pixel electrode 613 formed into a predetermined shape bypatterning is disposed on the second interlayer insulating film 611 band connected to the source region 607 a through the contact hole 612 a.The pixel electrode 613 can be made of ITO.

A power source line 614 is disposed on the first interlayer insulatingfilm 611 a and connected to the drain region 607 b through contact hole612 b.

As described above, a driving thin film transistor 615 connected to thepixel electrode 613 is formed in the circuit element portion 602.

The light emitting portion 603 includes a functional layer 617 stackedon each of the pixel electrodes 613 and a bank portion 618 beingsurrounded by the functional layers 617 and the pixel electrodes 613 andpartitioning the functional layers 617.

The pixel electrodes 613, the functional layers 617, and the cathode 604disposed on the functional layers 617 constitute a light emittingelement. Each of the pixel electrodes 613 is formed in a substantiallyrectangular shape in plan view by patterning. The bank portion 618 isdisposed between the pixel electrodes 613.

The bank portion 618 includes an inorganic bank layer (first bank layer)618 a and an organic bank layer (second bank layer) 618 b disposed onthe inorganic bank layer 618 a. The inorganic bank layer 618 a can bemade of an inorganic material, such as silicon monoxide (SiO), silicondioxide (SiO₂), and titanium dioxide (TiO₂). The organic bank layer 618b can be made of a resist that has high heat resistance and high solventresistance, such as acrylic resin or polyimide resin, and is trapezoidin cross section. The periphery of each of the pixel electrodes 613 isoverlaid with a part of the bank portion 618.

An opening 619 is formed between the bank portions 618 such that thesize of the opening 619 increases in an upward direction with respectiveto the pixel electrode 613.

Each of the functional layers 617 includes a hole injection/transportlayer 617 a formed in a laminated state in the opening 619 on the pixelelectrode 613 and a light emitting layer 617 b disposed on the holeinjection/transport layer 617 a. Another functional layer having adifferent function may be formed adjacent to the light emitting layer617 b. For example, an electron transport layer can be formed.

The hole injection/transport layer 617 a has a function of transportingholes from the pixel electrode 613 and injecting the holes into thelight emitting layer 617 b. The hole injection/transport layer 617 a isformed by ejection of a first composite (functional liquid) containing amaterial for forming a hole injection/transport layer. This material canbe a publicly known material.

The light emitting layer 617 b emits light corresponding to red(R),green (G) or blue (B) and is formed by ejection of a second composite(functional liquid) containing a material for forming a light emittinglayer (light emitting material). It is preferable that a publicly knownmaterial that is insoluble in the hole injection/transport layer 617 abe used as a solvent for the second composite (nonpolar solvent). Theuse of such a nonpolar solvent can form the light emitting layer 617 bwithout redissolving the hole injection/transport layer 617 a.

The light emitting layer 617 b is constructed such that holes injectedfrom the hole injection/transport layer 617 a and electrons injectedfrom the cathode 604 are recombined together in the light emitting layerto emit light.

The cathode 604 covers the entire surface of the light emitting portion603, and functions to pass current through the functional layer 617 incooperation with the pixel electrode 613 such that the cathode 604 andthe pixel electrode 613 are paired with each other.

A process for manufacturing the display apparatus 600 will now bedescribed below with reference to FIGS. 15 to 23.

As illustrated in FIG. 15, the display apparatus 600 is manufacturedthrough a bank portion formation step (S111), a surface treatment step(S112), a hole injection/transport layer formation step (S113), a lightemitting layer formation step (S114), and a common electrode formationstep (S115). The manufacturing process is not limited to the illustratedprocess. For example, any of these steps may be removed from themanufacturing process, or another step may be added thereto if needed.

First, as illustrated in FIG. 16, in the bank portion formation step(S111), the inorganic bank layer 618 a is formed on the secondinterlayer insulating film 611 b. The inorganic bank layer 618 a isproduced by formation of an inorganic film on a position to be formedand then patterning of the inorganic film by, for example,photolithography. At this time, a part of the inorganic bank layer 618 aoverlaps the periphery of the pixel electrode 613.

After the inorganic bank layer 618 a is formed, the organic bank layer618 b is formed on the inorganic bank layer 618 a, as illustrated inFIG. 17. The organic bank layer 618 b is also formed by patterning usingphotolithography, as in the case of the inorganic bank layer 618 a.

The bank portion 618 is formed in this manner. Along with the formationof the bank portion 618, the opening 619 opened upward with respect tothe pixel electrode 613 is formed between the bank portions 618. Theopening 619 defines a pixel region.

In the surface treatment step (S112), lyophilic treatment and liquidrepellent treatment are performed. Regions to be subjected to thelyophilic treatment are a first lamination portion 618 aa in theinorganic bank layer 618 a and an electrode surface 613 a in the pixelelectrode 613. These regions are surface-treated so as to be renderedlyophilic by, for example, plasma treatment using oxygen as processinggas. The plasma treatment also serves as cleaning for ITO of which thepixel electrode 613 is made.

The liquid repellent treatment is applied to a wall surface 618 s of theorganic bank layer 618 b and a top surface 618 t of the organic banklayer 618 b. The wall surface 618 s and the top surface 618 t aresurface-treated so as to be fluorinated (rendered liquid repellent) by,for example, plasma treatment using methane tetrafluoride as processinggas.

The performance of the surface treatment described above enablesfunctional liquid droplets to be ejected to a targeted pixel region withmore reliability when the functional layer 617 is formed using thefunctional liquid droplet ejection head 17 and also can preventfunctional liquid droplets that have reached the target pixel regionfrom overflowing through the opening 619.

A display apparatus base 600A is obtained through the steps describedabove. The display apparatus base 600A is placed on the set table 21 ofthe liquid droplet ejection apparatus 1, as illustrated in FIG. 2, andis subjected to the hole injection/transport layer formation step (S113)and the light emitting layer formation step (S114), which are describedbelow.

As illustrated in FIG. 18, in the hole injection/transport layerformation step (S113), the first composite containing the material forforming the injection/transport layer is ejected from the functionalliquid droplet ejection head 17 to the opening 619 in the pixel region.Then, a polar solvent contained in the first composite is vaporizedthrough drying treatment and heat treatment, and the holeinjection/transport layer 617 a is thus formed on the pixel electrode613 (the electrode surface 613 a), as illustrated in FIG. 19.

The light emitting formation step (S114) will now be described below. Inthis step, as previously described, a nonpolar solvent insoluble in thehole injection/transport layer 617 a is used as a solvent for the secondcomposite for use in formation of the light emitting layer in order toavoid the hole injection/transport layer 617 a from being redissolvedtherein.

However, because the hole injection/transport layer 617 a has a pooraffinity for a nonpolar solvent, even when the second compositecontaining the nonpolar solvent is ejected onto the holeinjection/transport layer 617 a, it may be difficult to closely attachthe hole injection/transport layer 617 a and the light emitting layer617 b together or to uniformly form the light emitting layer 617 b.

To address this, in order to enhance affinity of the surface of the holeinjection/transport layer 617 a for the nonpolar solvent and thematerial for forming the light emitting layer, it is preferable that thehole injection/transport layer 617 a be subjected to surface treatment(surface modification treatment) before the light emitting layer isformed. This surface treatment is performed in such a manner that asurface modification material being the same or similar solvent as thenonpolar solvent for the second composite for use in the formation ofthe light emitting layer is applied to the hole injection/transportlayer 617 a and the applied surface is dried.

The performance of the treatment described above facilitates adaptationof the surface of the hole injection/transport layer 617 a to thenonpolar solvent. Therefore, the second composite containing thematerial for forming the light emitting layer can be uniformly appliedto the hole injection/transport layer 617 a in the subsequent stage.

Then, as illustrated in FIG. 20, the second composite containing thematerial for forming the light emitting layer corresponding to any oneof three colors (blue in FIG. 20) is implanted as functional liquiddroplets (into the opening 619) in a corresponding pixel region by apredetermined amount. The second composite implanted in the pixel regionspreads over the hole injection/transport layer 617 a, and the opening619 is filled with the second composite. Even if the second compositefalls outside the pixel region and reaches the top surface 618 t of thebank portion 618, since the top surface 618 t has been subjected to theliquid repellent treatment, as previously described, the secondcomposite can easily drop into the opening 619.

Thereafter, the ejected second composite is dried through dryingtreatment, the nonpolar solvent contained in the second composite isvaporized, and the light emitting layer 617 b is thus formed, asillustrated in FIG. 21. In FIG. 21, the light emitting layer 617 bcorresponding to blue (B) is formed.

Similarly, as illustrated in FIG. 22, after the same steps as in thelight emitting layer 617 b for blue are sequentially performed using thefunctional liquid droplet ejection heads 17, the light emitting layers617 b for the other colors (red (R) and green (G)) are formed. The orderof formation of the light emitting layers 617 b is not limited to thatdescribed above. The light emitting layers 617 b can be formed in anyorder. For example, the order of formation can be determined dependingon materials for forming the light emitting layers. Examples of a layoutpattern of the three colors of RGB include a stripe pattern, a mosaicpattern, and a delta pattern.

As described above, the functional layer 617, that is, the holeinjection/transport layer 617 a and the light emitting layer 617 b, areformed on the pixel electrode 613. Flow proceeds to the common electrodeformation step (S115).

In the common electrode formation step (S115), as illustrated in FIG.23, the cathode 604 (common electrode) is formed on the entire surfacesof the functional layer 617 and the organic bank layer 618 b by, forexample, vapor deposition, sputtering, or chemical-vapor deposition(CVD). In the present embodiment, the cathode 604 can be composed of,for example, a laminated structure of a calcium layer and an aluminumlayer.

An aluminum layer or silver layer functioning as an electrode or anovercoat layer that prevents oxidation thereof and that is made of SiO₂or silicon nitride (SiN) may be disposed on the cathode 604.

After the cathode 604 is formed in a manner described above, otherprocessing, such as sealing of sealing the upper portion of the cathode604 with a sealant and wiring, are performed, and the display apparatus600 is thus obtained.

FIG. 24 is an exploded perspective view of main portions of a plasmadisplay panel (PDP) apparatus (hereinafter referred to simply as adisplay apparatus 700). In FIG. 24, a part of the display apparatus 700is removed.

The display apparatus 700 includes a first substrate 701, a secondsubstrate 702 opposed thereto, and a discharge display portion 703defined therebetween. The discharge display portion 703 includes aplurality of discharge chambers 705. The plurality of discharge chambers705 are arranged such that a set of three discharge chambers 705consisting of a red discharge chamber 705R, a green discharge chamber705G, and a blue discharge chamber 705B constitute a single pixel.

Striped address electrodes 706 are spaced at predetermined intervals onan upper surface of the first substrate 701. A dielectric layer 707 isdisposed so as to cover the address electrodes 706 and the upper surfaceof the first substrate 701. Partitions 708 are disposed substantiallyvertically between the address electrodes 706 on the dielectric layer707. The partitions 708 include, in addition to the partitions extendingalong the address electrodes 706 at both sides of each of the addresselectrodes 706 in a width direction thereof, which are described aboveand illustrated in FIG. 24, partitions extending in a directionorthogonal to the address electrode 706 (not shown).

Each of the discharge chambers 705 lies in a region partitioned by thepartitions 708.

A phosphor 709 is disposed in each of the discharge chambers 705. Thephosphors 709 include a red phosphor 709R disposed at the bottom of thered discharge chamber 705R and emitting a red fluorescence, a greenphosphor 709G disposed on the bottom at the green discharge chamber 705Gand emitting a green fluorescence, and a blue phosphor 709 disposed atthe bottom of the blue discharge chamber 705B and emitting a bluefluorescence.

A plurality of display electrodes 711 are arranged in a striped shape atpredetermined intervals on a surface of the second substrate 702 thatfaces downward in the drawing and extend in a direction orthogonal tothe address electrodes 706. A dielectric layer 712 and an overcoat layer713 made of, for example, magnesium oxide (MgO), are disposed so as tocover the display electrodes 711.

The first substrate 701 and the second substrate 702 opposed thereto areattached to each other such that the address electrodes 706 are thedisplay electrodes 711 are substantially orthogonal to each other. Theaddress electrodes 706 and the display electrodes 711 are connected toan alternating-current power supply (not shown).

Energization of the address electrodes 706 and the display electrodes711 excite the phosphors 709 in the discharge display portion 703 andthus cause them to emit light, thus enabling color display.

According to the present embodiment, the address electrodes 706, thedisplay electrodes 711, and the phosphors 709 can be formed using theliquid droplet ejection apparatus 1, as illustrated in FIG. 2. A processfor manufacturing the address electrodes 706 on the first substrate 701will now be described below.

In this case, the following steps are performed in a state in which thefirst substrate 701 is placed on the set table 21 in the liquid dropletejection apparatus 1.

First, a liquid material (functional liquid) that contains a materialfor forming conductive film wiring is ejected as functional liquiddroplets from the functional liquid droplet ejection heads 17 to regionswhere the address electrodes are to be formed. The liquid material is amaterial in which conductive particles (e.g., metal particles) aredispersed in a dispersion medium. Examples of the conductive particlesinclude metal particles containing gold, silver, copper, palladium, ornickel and a conductive polymer.

After the liquid material has been supplied to all target regions wherethe address electrodes are to be formed, the ejected liquid material isdried to vaporize a dispersion medium contained in the liquid material.Thus, the address electrodes 706 are formed.

The formation of the address electrodes 706 is described above. Thedisplay electrodes 711 and the phosphors 709 can also be formed throughthe foregoing steps.

For the formation of the display electrodes 711, a liquid material(functional liquid) that contains a material for forming conductive filmwiring, as in the case of the formation of the address electrodes 706,is ejected as functional liquid droplets from the functional liquiddroplet ejection heads 17 to regions where the display electrodes are tobe formed.

For the formation of the phosphors 709, a liquid material (functionalliquid) that contains a fluorescent material corresponding to each color(R, G, B) is ejected as liquid droplets from the functional liquiddroplet ejection heads 17 into a discharge chamber 705 corresponding tothe color.

FIG. 25 is a cross-sectional view of main portions of an electronemission apparatus (also called an FED apparatus or SED apparatus:hereinafter, referred to simply as a display apparatus 800). In FIG. 25,a part of the display apparatus 800 is shown.

The display apparatus 800 includes a first substrate 801, a secondsubstrate 802 opposed thereto, and a field emission display portion 803defined therebetween. The field emission display portion 803 includes aplurality of electron emitting portions 805 arranged in a matrix.

A cathode electrode 806 including a first element electrode 806 a and asecond element electrode 806 b is disposed on an upper surface of thefirst substrate 801. The first element electrode 806 a and the secondelement electrode 806 b face each other. A conductive film 807 having agap 808 is formed in an area sandwiched between the first elementelectrode 806 a and the second element electrode 806 b. The firstelement electrode 806 a, the second element electrode 806 b, and theconductive film 807 constitute each of the electron emitting portions805. The conductive film 807 can be made of, for example, palladium (II)oxide (PdO). The gap 808 can be generated by forming after theconductive film 807 is formed.

An anode electrode 809 is disposed on a lower surface of the secondsubstrate 802 facing the cathode electrode 806. A grid-like bank portion811 is disposed is disposed on a lower surface of the anode electrode809. A phosphor 813 is arranged in each of downward openings 812surrounded by the bank portion 811 so as to correspond to the electronemitting portion 805. The phosphors 813 include a red phosphor 813R, agreen phosphor 813G, and a blue phosphor 813B for emitting a redfluorescence, a green fluorescence, and a blue fluorescence,respectively, which are arranged in a pattern described above in theopenings 812.

The first substrate 801 and the second substrate 802 having thestructure described above are attached together with a minute gaptherebetween. The display apparatus 800 causes electrons emitted fromthe cathode electrode 806 or the second element electrode 806 b throughthe conductive film 807 (gap 808) to strike the phosphor 813 disposed onthe anode electrode 809, excites the electrons, and emits light.Therefore, the display apparatus 800 can realize color display.

In this case, similar to the other embodiments, the first elementelectrode 806 a, the second element electrode 806 b, the conductive film807, and the anode electrode 809 can be formed using the liquid dropletejection apparatus 1. In addition, the phosphors 813R, 813G, and 813Bcan also be formed using the liquid droplet ejection apparatus 1.

The first element electrode 806 a, the second element electrode 806 b,and the conductive film 807 have a shape in plan view illustrated inFIG. 26A. To form these film and electrodes, as illustrated in FIG. 26B,a bank portion BB is formed in advance by, for example, photolithographyin a region except a portion in which the first element electrode 806 a,the second element electrode 806 b, and the conductive film 807 are tobe built. Then, the first and the second element electrodes 806 a and806 b are formed in a groove defined by the bank portion BB (by an inkjet method using the liquid droplet ejection apparatus 1), and the usedsolvent is dried and a film is formed. Thereafter, the conductive film807 is formed (by the ink jet method using the liquid droplet ejectionapparatus 1). After the conductive film 807 is formed, the bank portionBB is removed (by ashing removal), and the processing proceeds to theforming process described above. Preferably, as in the case of theorganic EL apparatus, the first substrate 801 and the second substrate802 may be subjected to lyophilic treatment, and liquid repellencytreatment may be subjected to the bank portions 811 and BB.

Other examples of the electro-optical apparatus include apparatuses forforming metallic wiring, a lens, a resist, and a light diffuser. Variouskinds of electro-optical apparatuses (devices) can be efficientlymanufactured by using the liquid droplet ejection apparatus 1 inmanufacture thereof.

1. A liquid droplet ejection apparatus comprising: a writing device thatperforms writing on a workpiece by ejecting functional liquid from atleast one ink jet functional liquid droplet ejection head while movingthe functional liquid droplet ejection head relative to the workpiece; aweight measuring device that measures an amount of ejected droplets onthe basis of a weight of the functional liquid ejected from thefunctional liquid droplet ejection head, the weight measuring devicebeing disposed adjacent to the writing device; and a controlling devicethat controls a driving power for the functional liquid droplet ejectionhead on the basis of a measurement result input from the weightmeasuring device.
 2. The liquid droplet ejection apparatus according toclaim 1, further comprising: a cleaning device that sucks the functionalliquid in the functional liquid droplet ejection head and wipes thefunctional liquid droplet ejection head, wherein the writing deviceincludes an x-axis table that mounts the workpiece thereon and thatmoves the workpiece in the x-axis direction and a y-axis table thatmounts the functional liquid droplet ejection head thereon and thatmoves the functional liquid droplet ejection head in the y-axisdirection, wherein the cleaning device is disposed in a path of movementof the functional liquid droplet ejection head in the y-axis direction,and wherein the weight measuring device is disposed between the x-axistable and the cleaning device in a path of movement of the functionalliquid droplet ejection head.
 3. The liquid droplet ejection apparatusaccording to claim 1, wherein the at least one functional liquid dropletejection head includes a plurality of functional liquid droplet ejectionheads, wherein the weight measuring device includes: a container thatreceives functional liquid ejected from any one of the functional liquiddroplet ejection heads; an electronic balance that measures a weight ofthe functional liquid in the container; and a flushing box disposedaround the container, wherein, while the functional liquid dropletejection head performs measurement ejection on the container, theflushing box receives waste ejection from the other functional liquiddroplet ejection heads.
 4. The liquid droplet ejection apparatusaccording to claim 3, further comprising: a sub-table that moves theweight measuring device in the x-axis direction, wherein the pluralityof functional liquid droplet ejection heads are arranged in the x-axisdirection and divided into head groups.
 5. The liquid droplet ejectionapparatus according to claim 4, further comprising: a protective coverthat covers a space above the container when the weight of thefunctional liquid is measured by the electronic balance, the protectivecover being disposed in a path of movement of the sub-table.
 6. A methodfor manufacturing an electro-optical apparatus, the method forming afilm on the substrate using the liquid droplet ejection apparatusaccording to claim
 1. 7. An electro-optical apparatus including theworkpiece on which a film is formed using the liquid droplet ejectionapparatus according to claim
 1. 8. An electronic apparatus including theelectro-optical apparatus manufactured by the method according to claim6.